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Plasma processing: General Concepts, Modeling and Simulation
July 2, 2020 from 9:00 am — 10:00 am
Zoom Webinar with George Kokkoris
Institute of Nanoscience & Nanotechnology
National Center for Scientific Research (NCSR) “Demokritos”, Greece
Plasma technology has served the semiconductor industry for almost 40 years and has been extensively used for material processing in micro- and nanotechnology. During the last years, new applications and challenges of plasma technology emerged in several fields giving birth to terms, such as plasma agriculture, plasma medicine and electrification of the chemical industry. During the seminar, general concepts of plasma discharges will be introduced. Current and new applications of plasma discharges will be discussed. Modeling and simulation approaches will be analyzed through computational case studies of plasma processing in different fields and reactors.
George Kokkoris is a Research Associate at the Institute of Nanoscience & Nanotechnology of National Center for Scientific Research (NCSR) “Demokritos”. He received the BSc in Chemical Engineering from the National Technical University of Athens (NTUA), a MSc in Microelectronics from the department of Informatics and Telecommunications of the National and Kapodistrian University of Athens, and the PhD from the school of Chemical Engineering of NTUA. The focus of his research has been on modeling and simulation of a) plasma etching and chemical vapor deposition processes for microelectronics and nanofabrication, b) microfluidic devices and Lab-on-a-Chip systems, and c) wetting behavior and condensation on surfaces. He has participated in 9 EU and 8 national projects. He is the author or co-author of 65 articles in peer-reviewed journals [h-index=21 (google scholar), 19 (scopus)], 15 articles in peer-reviewed conference proceedings, 3 patent applications, and more than 100 international conference communications.
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